High-Performance p-and n-MOS Transistors

To construct a CMOS inverter, both p-MOS and n-MOS transistors must be integrated on the same wafer. Depending on the material system, either hetero-inverters (using different materials for p- and n-type devices) or homo-inverters (using the same material) are viable approaches for realizing energy-efficient CMOS circuits. All the previously mentioned techniques—including material growth, transfer, doping, and gate stack engineering—are essential and must be seamlessly integrated to enable this technology.